Ching-Yueh Chen

TSMC: 2 patents #106 of 851Top 15%

📍 Dashulong, TW: #8 of 38 inventorsTop 25%

Overall (2005): #61,144 of 245,428Top 25%

Patents 2005

Issued Patents 2005

Showing 1–2 of 2 patents

Patent #	Title	Co-Inventors	Date
6924069	Method for repairing attenuated phase shift masks	—	2005-08-02
6838214	Method of fabrication of rim-type phase shift mask	—	2005-01-04