Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6968251 | Defect analysis sampling control | Ching-Cheng Shih | 2005-11-22 |
| 6923645 | Gas mixing device | Teng-Mao Chiu | 2005-08-02 |
| 6911374 | Fabrication method for shallow trench isolation region | Chin-Wei Liao, Hsueh-Hao Shih, Kuang-Chao Chen | 2005-06-28 |
| 6875624 | Combined E-beam and optical exposure semiconductor lithography | — | 2005-04-05 |
| 6858353 | Increased-contrast film for high-transmittance attenuated phase-shaft masks | Chia-Yang Chang, Tyng-Hao Hsu, Chang-Cheng Hung | 2005-02-22 |