Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905621 | Method for preventing the etch transfer of sidelobes in contact hole patterns | Jian-Hong Chen | 2005-06-14 |
| 6900134 | Method for forming openings in a substrate using bottom antireflective coatings | Jen-Chieh Shih, Jian-Hong Chen | 2005-05-31 |