Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6971945 | Multi-step polishing solution for chemical mechanical planarization | Zhendong Liu, Robert Schmidt, Terence M. Thomas | 2005-12-06 |
| 6916742 | Modular barrier removal polishing slurry | Qianqiu Ye, Matthew VanHanehem | 2005-07-12 |