Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6840886 | Method and apparatus for a low cost, high speed, and compact nanometer precision motion stage using friction drive and flexure hinge | — | 2005-01-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6840886 | Method and apparatus for a low cost, high speed, and compact nanometer precision motion stage using friction drive and flexure hinge | — | 2005-01-11 |