Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974987 | Semiconductor device | Hisashi Ogawa, Isao Miyanaga, Takayuki Yamada, Kazuichiro Itonaga, Yoshihiro Mori | 2005-12-13 |
| 6849470 | APPARATUS AND METHOD FOR OPTICAL EVALUATION, APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE | Takayuki Yamada, Masanori Okuyama | 2005-02-01 |