Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953609 | High-density plasma process for depositing a layer of silicon nitride | — | 2005-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953609 | High-density plasma process for depositing a layer of silicon nitride | — | 2005-10-11 |