Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960115 | Multiprobe detection system for chemical-mechanical planarization tool | Matthew Weldon, Malcolm Grief, Paul Holzapfel, Mark Meloni, Robert A. Eaton | 2005-11-01 |
| 6923711 | Multizone carrier with process monitoring system for chemical-mechanical planarization tool | Daniel Ray Trojan | 2005-08-02 |
| 6869354 | Zero cooling air flow overfire air injector and related method | William Theodore Lipinski, Peter V. Centore, George M. Gorring, James J. Jennings, Robert W. Waltz +4 more | 2005-03-22 |