Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969571 | Exposure method using complementary divided mask, exposure apparatus, semiconductor device, and method of producing the same | Shinichiro Noudo, Hiroyuki Nakano, Hiroki Hane | 2005-11-29 |
| 6916582 | Mask for fabrication of semiconductor devices, process for production of the same, and process for fabrication of semiconductor devices | Masaki Yoshizawa, Shigeru Moriya | 2005-07-12 |