Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933228 | Method of manufacturing of contact plug in a contact hole on a silicon substrate | — | 2005-08-23 |
| 6923869 | Device for deposition with chamber cleaner and method for cleaning the chamber | — | 2005-08-02 |
| 6844259 | Method for forming contact plug in semiconductor device | — | 2005-01-18 |