Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933236 | Method for forming pattern using argon fluoride photolithography | Sung-Kwon Lee, Weon-Joon Suh | 2005-08-23 |
| 6867145 | Method for fabricating semiconductor device using photoresist pattern formed with argon fluoride laser | Sung-Kwon Lee, Chang-Youn Hwang | 2005-03-15 |
| 6852592 | Methods for fabricating semiconductor devices | Sung-Kwon Lee, Min-Suk Lee | 2005-02-08 |