Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6924078 | Photoresist monomers, polymers and photoresist compositions for preventing acid diffusion | Geun Su Lee, Ki Soo Shin, Se Jin Choi, Deog-Bae Kim, Jae-Hyun Kim | 2005-08-02 |
| 6921622 | Photoresist monomers, polymers thereof and photoresist compositions containing the same | Geun Su Lee, Ki Soo Shin | 2005-07-26 |
| 6916594 | Overcoating composition for photoresist and method for forming photoresist pattern using the same | Cheol Kyu Bok, Seung Chan Moon, Ki Soo Shin | 2005-07-12 |
| 6875956 | Method of forming photoresist pattern using hot plate oven | Jin-Soo Kim, Ki Soo Shin | 2005-04-05 |
| 6866984 | ArF photoresist copolymers | Cheol Kyu Bok, Ki Ho Baik | 2005-03-15 |
| 6858371 | Maleimide-photoresist monomers containing halogen, polymers thereof and photoresist compositions comprising the same | Geun Su Lee, Min Ho Jung, Cha-Won Koh, Ki Soo Shin | 2005-02-22 |
| 6849375 | Photoresist monomers, polymers thereof and photoresist compositions containing the same | Geun Su Lee, Ki Soo Shin | 2005-02-01 |
| 6841526 | Cleaning solution for removing photoresist | Geun Su Lee, Ki Soo Shin | 2005-01-11 |