Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958301 | Method for forming Ta2O5 dielectric layer by using in situ N2O plasma treatment | Kyong-Min Kim | 2005-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958301 | Method for forming Ta2O5 dielectric layer by using in situ N2O plasma treatment | Kyong-Min Kim | 2005-10-25 |