Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6887775 | Process and apparatus for epitaxially coating a semiconductor wafer and epitaxially coated semiconductor wafer | Wilfried von Ammon, Ruediger Schmolke, Wolfgang Siebert | 2005-05-03 |