Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6869481 | Method and device for regulating the differential pressure in epitaxy reactors | Georg Brenninger | 2005-03-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6869481 | Method and device for regulating the differential pressure in epitaxy reactors | Georg Brenninger | 2005-03-22 |