Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6861360 | Double-sided polishing process for producing a multiplicity of silicon semiconductor wafers | Guido Wenski, Thomas Altmann, Alexander Heilmaier | 2005-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6861360 | Double-sided polishing process for producing a multiplicity of silicon semiconductor wafers | Guido Wenski, Thomas Altmann, Alexander Heilmaier | 2005-03-01 |