Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6922272 | Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices | Dinesh Maheshwari | 2005-07-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6922272 | Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices | Dinesh Maheshwari | 2005-07-26 |