Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6917472 | Achromatic fresnel optics for ultraviolet and x-ray radiation | Yuxin Wang | 2005-07-12 |
| 6914723 | Reflective lithography mask inspection tool based on achromatic Fresnel optics | Yuxin Wang | 2005-07-05 |
| 6885503 | Achromatic fresnel optics based lithography for short wavelength electromagnetic radiations | Yuxin Wang, Kenneth W. Nill | 2005-04-26 |