Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6867535 | Method of and apparatus for wafer-scale packaging of surface microfabricated transducers | — | 2005-03-15 |
| 6862254 | Microfabricated ultrasonic transducer with suppressed substrate modes | Paul Wagner | 2005-03-01 |