Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955801 | High-purity fluorine gas, production and use thereof, and method for analyzing trace impurities in high-purity fluorine gas | Junichi Torisu, Hitoshi Atobe | 2005-10-18 |