Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6964804 | Micromachined structures made by combined wet and dry etching | Dan Steinberg, David W. Sherrer | 2005-11-15 |
| 6885786 | Combined wet and dry etching process for micromachining of crystalline materials | Dan Steinberg | 2005-04-26 |