AT

Akinobu Tanaka

NT NTT: 1 patents #34 of 198Top 20%
SC Shin-Etsu Chemical Co.: 1 patents #79 of 225Top 40%
Overall (2005): #241,784 of 245,428Top 100%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6841334 Onium salts and positive resist materials using the same Fujio Yagihashi, Tomoyoshi Furihata, Jun Watanabe, Yoshio Kawai, Tadahito Matsuda 2005-01-11