Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951825 | Method of etching a SiN/Ir/TaN or SiN/Ir/Ti stack using an aluminum hard mask | Tingkai Li, David R. Evans, Sheng Teng Hsu | 2005-10-04 |
| 6864589 | X/Y alignment vernier formed on a substrate | — | 2005-03-08 |