YK

Yoshiharu Kataoka

Canon: 2 patents #488 of 2,436Top 25%
Overall (2005): #28,201 of 245,428Top 15%
2
Patents 2005

Issued Patents 2005

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6876435 Exposure method, plane alignment method, exposure apparatus, and device manufacturing method Tai Hoshi 2005-04-05
6838686 Alignment method and exposure apparatus using the method — 2005-01-04