Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6855621 | Method of forming silicon-based thin film, method of forming silicon-based semiconductor layer, and photovoltaic element | Takaharu Kondo, Masafumi Sano, Akira Sakai, Yasuyoshi Takai, Ryo Hayashi | 2005-02-15 |