Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974731 | Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device | Shunpei Yamazaki, Hisashi Ohtani, Koichiro Tanaka, Kenji Kasahara | 2005-12-13 |
| 6927109 | Laser irradiation apparatus laser irradiation method, semiconductor device and method of manufacturing a semiconductor device | Koichiro Tanaka, Shunpei Yamazaki | 2005-08-09 |
| 6844249 | Method for manufacturing a semiconductor device using laser light | Kenji Kasahara, Shunpei Yamazaki | 2005-01-18 |
| 6838324 | Semiconductor device provided with semiconductor circuit made of semiconductor element and method of fabricating the same | Shunpei Yamazaki, Setsuo Nakajima | 2005-01-04 |