TH

Thomas N. Horsky

AT Axcelis Technologies: 1 patents #14 of 47Top 30%
📍 Boxborough, MA: #6 of 27 inventorsTop 25%
🗺 Massachusetts: #1,495 of 6,037 inventorsTop 25%
Overall (2005): #88,739 of 245,428Top 40%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6958481 Decaborane ion source Alexander S. Perel, William K. Loizides 2005-10-25