Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6884699 | Process and unit for production of polycrystalline silicon film | Tetsuya Ogawa, Hidetada Tokioka, Junichi Nishimae, Tatsuki Okamoto, Yukio Sato +2 more | 2005-04-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6884699 | Process and unit for production of polycrystalline silicon film | Tetsuya Ogawa, Hidetada Tokioka, Junichi Nishimae, Tatsuki Okamoto, Yukio Sato +2 more | 2005-04-26 |