Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949833 | Combined atomic layer deposition and damascene processing for definition of narrow trenches | William J. O'Kane | 2005-09-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949833 | Combined atomic layer deposition and damascene processing for definition of narrow trenches | William J. O'Kane | 2005-09-27 |