Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6886244 | Segmented pallet for disk-shaped substrate electrical biassing and apparatus comprising same | Taesun Kim | 2005-05-03 |
| 6843892 | Apparatus and method for selectively and controllably electrically biasing a plurality of substrates on a pallet | — | 2005-01-18 |
| 6844031 | Method & apparatus for multilayer deposition utilizing a common ion beam source | Mark A. Shows | 2005-01-18 |