Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6963789 | Substrate processing apparatus control system and substrate processing apparatus | Tamihiro Bun, Kinya Murata, Kenji Hashinoki, Kenji Kamei, Noriaki Yokono +1 more | 2005-11-08 |
| 6893171 | Substrate treating apparatus | Yoshiteru Fukutomi, Kenji Sugimoto, Takashi Ito, Takeo Okamoto, Yukihiko Inagaki +1 more | 2005-05-17 |