Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6884297 | Thin film deposition reactor | Choon Kum BAIK, Hong Lim, Ho Chang | 2005-04-26 |
| 6852168 | Reactor for depositing thin film on wafer | — | 2005-02-08 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6884297 | Thin film deposition reactor | Choon Kum BAIK, Hong Lim, Ho Chang | 2005-04-26 |
| 6852168 | Reactor for depositing thin film on wafer | — | 2005-02-08 |