Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6867141 | Method for fabricating semiconductor device and forming interlayer dielectric film using high-density plasma | Jong-Koo Lee | 2005-03-15 |
| 6841851 | Semiconductor device having a high density plasma oxide layer | — | 2005-01-11 |