Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6887794 | Pre-cleaning method of substrate for semiconductor device | — | 2005-05-03 |
| 6857388 | Cold wall chemical vapor deposition apparatus with a heater control unit | Tae Wan Lee, Yong Ho Lee | 2005-02-22 |