Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6945861 | Polishing head of chemical mechanical polishing apparatus and polishing method using the same | Jae-Phil Boo, Jong Soo Kim, Sang-Seon Lee, Sun-Wung Lee | 2005-09-20 |
| 6921323 | Apparatus for polishing a semiconductor wafer and method therefor | Jae-Phil Boo, Sang-Seon Lee, Sun-Wung Lee | 2005-07-26 |
| 6881135 | Polishing head of chemical mechanical polishing apparatus and polishing method using the same | Jae-Phil Boo, Jong Soo Kim, Sang-Seon Lee, Sun-Wung Lee | 2005-04-19 |
| 6840846 | Polishing station of a chemical mechanical polishing apparatus | Jae-Phil Boo, Hyun-Sung Lee | 2005-01-11 |