Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953946 | Emitter for electron-beam projection lithography system and manufacturing method thereof | In-kyeong Yoo, Soo-hwan Jeong, Dong Wook Kim | 2005-10-11 |
| 6870173 | Electron-beam focusing apparatus and electron-beam projection lithography system employing the same | In-kyeong Yoo, Dong Wook Kim | 2005-03-22 |