Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6843809 | Vacuum/purge operation of loadlock chamber and method of transferring a wafer using said operation | — | 2005-01-18 |
BP
Bong-Jin Park
Overall (2005): #230,982 of 245,428Top 95%
1
Patents 2005