Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6855466 | Planarizing antireflective coating compositions | Edward K. Pavelchek, Timothy G. Adams, Manuel DoCanto, George G. Barclay | 2005-02-15 |
| 6852421 | Coating compositions for use with an overcoated photoresist | Gerald B. Wayton, Peter Trefonas, III, Tomoki Kurihara | 2005-02-08 |