Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946306 | Method of manufacturing a semiconductor device and a fabrication apparatus for a semiconductor device | Akio Ishizu, Kazutoshi Takashima, Yoshihiko Kobayashi, Tsutomu Ida, Shigeru Haga +4 more | 2005-09-20 |
| 6852553 | Semiconductor device fabrication method and semiconductor device fabrication apparatus | Akio Ishizu, Kazutoshi Takashima, Yoshihiko Kobayashi, Tsutomu Ida, Shigeru Haga +4 more | 2005-02-08 |