Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6928751 | Megasonic cleaner and dryer system | Chad Michael Hosack, Jeffrey M. Lauerhaas, Mario E. Bran, Paul Patel, Yi Wu +2 more | 2005-08-16 |
| 6923192 | Stackable process chambers | Chad Michael Hosack, Paul Patel | 2005-08-02 |