Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852603 | Fabrication of abrupt ultra-shallow junctions | Srinivasan Chakravarthi | 2005-02-08 |
| 6849528 | Fabrication of ultra shallow junctions from a solid source with fluorine implantation | Srinivasan Chakravarthi | 2005-02-01 |