Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6924235 | Sidewall smoothing in high aspect ratio/deep etching using a discrete gas switching method | David Johnson, Shouliang Lai | 2005-08-02 |
| 6905626 | Notch-free etching of high aspect SOI structures using alternating deposition and etching and pulsed plasma | David Johnson, Shouliang Lai | 2005-06-14 |
| 6846747 | Method for etching vias | David Johnson | 2005-01-25 |