Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6941963 | High-speed diaphragm valve for atomic layer deposition | Jarmo Maula, Hannu Leskinen, Pekka Kuosmanen, Kari Harkonen, Bradley J. Aitchison | 2005-09-13 |
| 6907897 | Diaphragm valve for high-temperature precursor supply in atomic layer deposition | Jarmo Maula, Hannu Leskinen, Pekka Kuosmanen, Kari Harkonen, Bradley J. Aitchison | 2005-06-21 |