Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939579 | ALD reactor and method with controlled wall temperature | Niklas Bondestam | 2005-09-06 |
| 6889864 | Source chemical container assembly | Jan von Zweygbergk, Marko J. Kukkonen | 2005-05-10 |
| 6881263 | Method of growing a thin film onto a substrate | Pekka Soininen | 2005-04-19 |