Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6961163 | Scanning optical system | — | 2005-11-01 |
| 6954222 | Manufacturing method of scanning optical system | Takashi Iizuka | 2005-10-11 |
| 6954296 | Scanning optical system | — | 2005-10-11 |
| 6937376 | Scanning optical system | — | 2005-08-30 |
| 6898025 | Projection aligner and optical system therefor | Shuichi Takeuchi | 2005-05-24 |
| 6873466 | Scanning optical system | Yoshihiro Hama, Yasushi Suzuki, Shimpei Shinozaki, Toshimitsu Saito | 2005-03-29 |
| 6853470 | Scanning optical system | — | 2005-02-08 |