Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905625 | Plasma processing method and apparatus | Takayuki Kai, Yoichiro Yashiro | 2005-06-14 |
| 6893971 | Dry etching method and apparatus | Hiroshi Tanabe, Hiroshi Imai | 2005-05-17 |
| 6875307 | Method and apparatus for plasma processing | Ichiro Nakayama | 2005-04-05 |
| 6864640 | Plasma processing method and apparatus thereof | Yukihiro Maegawa, Izuru Matsuda | 2005-03-08 |