Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6973722 | Release height adjustment of stressy metal devices by annealing before and after release | Thomas Hantschel, Dirk De Bruyker, Chinnwen Shih, Jeng Ping Lu, Christopher L. Chua +2 more | 2005-12-13 |
| 6966784 | Flexible cable interconnect assembly | Koenraad Van Schuylenbergh, Armin R. Volkel, Thomas H. DiStefano, Michel A. Rosa, Eugene M. Chow +1 more | 2005-11-22 |
| 6947291 | Photolithographically-patterned out-of-plane coil structures and method of making | Christopher L. Chua, Francesco Lemmi, Koenraad Van Schuylenbergh, Jeng Ping Lu, Eric Peeters +3 more | 2005-09-20 |
| 6866255 | Sputtered spring films with low stress anisotropy | Scott E. Solberg, Karl A. Littau | 2005-03-15 |
| 6856225 | Photolithographically-patterned out-of-plane coil structures and method of making | Christopher L. Chua, Francesco Lemmi, Koenraad Van Schuylenbergh, Jeng Ping Lu, Eric Peeters +3 more | 2005-02-15 |
| 6848175 | Method of forming an out-of-plane structure | Ping Mei, Koenraad Van Schuylenbergh | 2005-02-01 |