Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974962 | Lateral shift measurement using an optical technique | Boaz Brill, Moshe Finarov | 2005-12-13 |
| 6940609 | Method and system for measuring the topography of a sample | — | 2005-09-06 |
| 6885446 | Method and system for monitoring a process of material removal from the surface of a patterned structure | Vladimir Machavariani, Amit Weingarten, Avi Ravid | 2005-04-26 |