Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6892669 | CVD apparatus | Ge Xu | 2005-05-17 |
| 6851384 | Remote plasma apparatus for processing substrate with two types of gases | Katsuhisa Yuda | 2005-02-08 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6892669 | CVD apparatus | Ge Xu | 2005-05-17 |
| 6851384 | Remote plasma apparatus for processing substrate with two types of gases | Katsuhisa Yuda | 2005-02-08 |