Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6887721 | Method of purging CVD apparatus and method for judging maintenance of times of semiconductor production apparatuses | Hiroyuki Hasegawa, Tomonori Yamaoka, Yoshio Ishihara, Takayuki Satou, Katsumasa Suzuki +1 more | 2005-05-03 |